April 22 - 26, 2024
Seattle, Washington
May 7 - 9, 2024 (Virtual)
Symposium Supporters
2024 MRS Spring Meeting & Exhibit
QT06.02.03

Thermal Laser Epitaxy for Ultraclean Heterostructures

When and Where

Apr 23, 2024
2:30pm - 3:00pm
Room 447, Level 4, Summit

Presenter(s)

Co-Author(s)

Hans Boschker1,Felix Hensling2,Lena Majer2,Brendan Faeth2,Jochen Mannhart2,Wolfgang Braun1,2

Epiray GmbH1,Max Planck Institute for Solid State Research2

Abstract

Hans Boschker1,Felix Hensling2,Lena Majer2,Brendan Faeth2,Jochen Mannhart2,Wolfgang Braun1,2

Epiray GmbH1,Max Planck Institute for Solid State Research2
We have developed a new thin-film deposition technique that is especially suited to the growth of an extremely wide range of heterostructures with atomic precision. Thermal laser epitaxy (TLE) uses chemical elements as sources, which are evaporated with continuous-wave lasers [1]. The lasers’ virtually arbitrary power density allows for the evaporation of practically all elements of the periodic table in the same setup [2]. Furthermore, a wide range of elements has been grown in oxygen environments up to pressures as high as 10<sup>-2</sup> mbar, yielding films of binary oxides [4,5]. In addition, extremely clean oxide surfaces can be prepared with the use of a CO<sub>2</sub> laser substrate heater that enables temperatures (<i>T</i>) up to 2000 °C [5]. Here, I will introduce the advantages of TLE for epitaxy and focus in detail on the epitaxy of ultraclean oxide heterostructures. <br/> <br/> <br/> <br/><b>References</b><br/> <br/>[1] W. Braun, J. Mannhart, AIP Adv. 9 (2019) 085310<br/>[2] T.J. Smart, et al., J. Laser Appl. 33 (2021) 022008<br/>[3] D.-Y. Kim, J. Mannhart, W. Braun, Appl. Phys. Lett. Mater. 9 (2021) 081105<br/>[4] D.-Y. Kim, J. Mannhart, W. Braun, J. Vac. Sci. Tech. A 39 (2021) 053406<br/>[5] W. Braun, et al., Appl. Phys. Lett. Mater. 8 (2020) 071112

Keywords

epitaxy | nucleation & growth | oxide

Symposium Organizers

Lucas Caretta, Brown University
Yu-Tsun Shao, University of Southern California
Sandhya Susarla, Arizona State University
Y. Eren Suyolcu, Max Planck Institute

Session Chairs

Sandhya Susarla
Y. Eren Suyolcu

In this Session