April 22 - 26, 2024
Seattle, Washington
May 7 - 9, 2024 (Virtual)

Event Supporters

2024 MRS Spring Meeting
EN07.01.05

Thermoreflectance-Based Thermometry of Silicon Thin Films with Resonantly Enhanced Temperature Sensitivity

When and Where

Apr 22, 2024
11:30am - 11:45am
Room 344, Level 3, Summit

Presenter(s)

Co-Author(s)

Xinchao Wang1,Changxing Shi1,Qifan Zheng1,Jan Maroske1,Dakotah Thompson1

University of Wisconsin-Madison1

Abstract

Xinchao Wang1,Changxing Shi1,Qifan Zheng1,Jan Maroske1,Dakotah Thompson1

University of Wisconsin-Madison1
We demonstrate a thermoreflectance-based thermometry technique with an ultimate temperature resolution of 60 μK in a 2.6 mHz bandwidth. This temperature resolution was achieved using a 532 nm-wavelength probe laser and a ~1 μm-thick silicon transducer film with a thermoreflectance coefficient of -4.7×10<sup>-3</sup> K<sup>-1</sup> at room temperature. The thermoreflectance sensitivity reported here is over an order-of-magnitude greater than that of metal transducers, and is comparable to the sensitivity of traditional resistance thermometers. Supporting calculations reveal that the enhancement in sensitivity is due to optical interference in the thin film.

Keywords

microstructure

Symposium Organizers

Woochul Kim, Yonsei University
Sheng Shen, Carnegie Mellon University
Sunmi Shin, National University of Singapore
Sebastian Volz, The University of Tokyo

Session Chairs

Woochul Kim
Sunmi Shin

In this Session