Study on the Selective and Tailered Functionalization of Large-Area Graphene Using DUV

Controlling the properties of graphene as desired is important for expanding graphene research into applications and further studies. In particular, it is very important to selectively obtain desired properties at specific locations. We synthesized large-area CVD graphene^[1], created a window with a desired pattern, and exposed only local locations to DUV for a certain period of time. Graphene is oxidized on the exposed surface by ozone (O₃) generated by DUV.<br/>We studied how the exposure time of graphene to DUV changes its electrical and optical properties. Graphene exposed to DUV exhibited increased optical transmittance^[2], significant p-type characteristics, and decreased charge mobility. Based on the results, only a portion of the graphene channel was exposed to DUV to partially functionalize it. Graphene channels, which have junction without boundaries, have various properties depending on their ratio without creating an increase in resistance at the interface. The functionalized graphene was characterized by Raman spectroscopy, spectrometry, and electrical properties.<br/><br/>[1] D Y Lee et al, Nano Convergence, 11, 32 (2024). “Conveyor CVD to high-quality and productivity of large-area graphene and its potentiality”<br/>[2] K S Kim et al, Nature, 457, 706-710 (2009). “Large-scale pattern growth of graphene films for stretchable transparent electrodes”