Diamond Diodes and Transistors—Progress on High Power Density and High Frequency Specifications

Diamond offers many advantages as an ultra wide bandgap semiconductor; in addition to the large bandgap, diamond boasts extreme thermal conductivity, stability, and beneficial electrical properties. In this work, we describe recent progress on materials and fabrication challenges to realize all-diamond PIN diodes and FETs, fabricated with CVD (chemical vapor deposition) grown diamond. To produce these devices, we grow doped diamond epitaxial layers which are subsequently fabricated into devices with cleanroom techniques compatible with silicon tools. We will share characterizations of these devices and next steps for all-diamond power components and integrated circuits.