December 1 - 6, 2024
Boston, Massachusetts
Symposium Supporters
2024 MRS Fall Meeting & Exhibit
EL08.08.13

Device-Grade Diamond Roadmap for 100mm and Beyond—Synthesis, Characterization and Promising Developments

When and Where

Dec 3, 2024
8:00pm - 10:00pm
Hynes, Level 1, Hall A

Presenter(s)

Co-Author(s)

John Ciraldo1

WD Advanced Materials1

Abstract

John Ciraldo1

WD Advanced Materials1
Availability and production capabilities in diamond are rapidly expanding. To enable next-generation diamond-based solutions, particularly in the quantum and semiconductor realms, WD Advanced Materials (“WDAM”), in cooperation with key industry collaborators, has developed new processes for the synthesis of large-scale single-crystal diamond wafers for electronic applications.
Through this talk, led by Chief Technology Officer John Ciraldo, WDAM will share an overview of recent product development breakthroughs supporting these emerging technologies, including R&D results, output from the D2 SCALE under DARPA’s LADDIS initiative, future research from D100 SCALE under the DARPA UWBGS initiative, and the latest on a new U.S.-based consortium, created to supply synchrotron-grade diamond to the national market through the DOE ARDAP program.
Program overview will cover modified growth systems in both 2.45GHz and 915MHz tools, as well as novel wafering and polishing technologies being developed under the DARPA-led programs.
WDAM will share third-party characterization data demonstrating exceptional material quality characteristics coupled with large substrate sizes, including anonymized comparisons to other commercially available products. In furtherance of the team’s form factor expansion efforts, WDAM will also present 30mm+ wafers with x-ray mapping, highlighting narrow rocking curves of about 30arcseconds, ultra-high doping concentrations, and evidence of strong electronic transport properties. The discussion will conclude with a summary of production capabilities and roadmap for bringing device-grade and quantum-grade material to market at these larger scales and with improved extrinsic material properties.

Keywords

plasma-enhanced CVD (PECVD) (deposition)

Symposium Organizers

Robert Bogdanowicz, Gdansk University of Technology
Chia-Liang Cheng, National Dong Hwa University
David Eon, Institut Neel
Shannon Nicley, Michigan State University

Symposium Support

Gold
Seki Diamond Systems

Bronze
Applied Diamond, Inc.
BlueWaveSemiconductor
Diatope GmbH
Element Six
Evolve Diamonds
Fine Abrasives Taiwan Co., LTD.
Fraunhofer USA
Great Lakes Crystal Technologies
HiQuTe Diamond
Plasmability LLC
QZabre AG
WD Advanced Materials

Session Chairs

Robert Bogdanowicz
Chia-Liang Cheng
David Eon
Shannon Nicley

In this Session