Beyond Substrates—Engineering Substrates to Further Diamond Technologies

Through DARPA led programs WD Advanced Materials (WDAM) has been developing methods to produce and finish large-scale, device-grade diamond substrates to support technologies in the semiconductor and quantum fields. However, it is necessary to look forward at how these substrates can be further enhanced to support device fabrication in these industries. Key, and common, examples are substrate doping to enhance electrical properties, and the creation of NV^- centers in diamond to support quantum efforts. Through this talk, led by Chief Technology Officer John Ciraldo, WDAM will discuss production of heterostructures for the creation of vertical devices. The primary focus, however, will be on more advanced methods technologies that can be implemented at wafer scale to support device fabrication. Examples include selective deposition techniques that allow for the fabrication of horizontal devices and integration of quantum and electronic regions in diamond. Alternative methods of production pattered quantum regions in otherwise extrinsic diamond will also be discussed.
We will additionally provide an overview of p-type and n-type doping at manufacturing scale, as well as production of isotopically enriched quantum material at the same scale. Data on conductivity, carrier concentrations, NV^- densities, T2* values, etc. will be provided for commercially available substrates at >25mm scale, as well as a discussion of timeline to bring these materials to market at 50mm+ scales.