Synthesis and Characterization of 2D Mo₂C and Its Graphene Heterostructures via Chemical Vapor Deposition

Transition metal carbides (TMCs) are highly valued for their exceptional mechanical and electrical properties, which make them ideal candidates for advanced nanoelectronics including sensors, electron emitters, and catalytic systems such as those used in hydrogen evolution reactions. Despite their potential, synthesizing these nanomaterials with large area, high quality, reproducibility, and homogeneity through scalable processes, remains challenging. Among various synthesis methods, chemical vapor deposition (CVD) stands out for its scalability and precise control over the microstructure. This study aims to explore the impact of various parameters for precise control and optimization over obtaining high-quality, large area and ultra-thin Mo₂C crystals via CVD. Catalyst thickness, temperature, duration, gas flow rates/ratios, and pressure were changed systematically to investigate variations in the morphology and growth kinetics of the crystals. By elucidating the relationship between these parameters and Mo₂C crystals and comprehending the fundamental development, application-specific morphology design and crystal fabrication are made feasible for numerous cutting-edge technologies.