April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL21.13.04

Impact of Post-Annealing Time Duration on the Structural, Optical and Resistive Switching Properties of RF Sputtered β-Ga2O3 Thin Films

When and Where

Apr 27, 2023
8:50am - 9:05am
EL21-virtual

Presenter(s)

Co-Author(s)

Asma Al Ghaithi1,Inas Taha1,Sumayya Ansari1,Haila Aldosari1

United Arab Emirates university1

Keywords

crystallographic structure | sputtering | thin film

Symposium Organizers

Iuliana Radu, Taiwan Semiconductor Manufacturing Company Limited
Heike Riel, IBM Research GmbH
Subhash Shinde, University of Notre Dame
Hui Jae Yoo, Intel Corporation

Symposium Support

Gold
Center for Sustainable Energy (ND Energy) and Office of Research

Silver
Raith America, Inc.

Session Chairs

Iuliana Radu
Subhash Shinde

In this Session