April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.07.25

Low-Temperature ALD Silicon Nitride for NAND Flash Memory with a Very High Frequency (60 MHz) Plasma Source

When and Where

Apr 12, 2023
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall

Presenter(s)

Co-Author(s)

Minjeong Rhee1,Il-Kwon Oh1

Ajou University1

Keywords

atomic layer deposition | nitride | Si

Symposium Organizers

Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University

Symposium Support

Gold
IEEE Electron Devices Society

Session Chairs

Supratik Guha
Francesca Iacopi

In this Session