April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.07.25
Low-Temperature ALD Silicon Nitride for NAND Flash Memory with a Very High Frequency (60 MHz) Plasma Source
When and Where
Apr 12, 2023
5:00pm - 7:00pm
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall
Presenter(s)
Co-Author(s)
Minjeong Rhee1,Il-Kwon Oh1
Ajou University1
Keywords
atomic layer deposition | nitride | Si
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Supratik Guha
Francesca Iacopi