April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.12.01
Area-Selective Atomic-Layer Deposition of Carborane Thiols on Copper for Patterning and Interconnect Applications
When and Where
Apr 14, 2023
10:30am - 10:45am
10:30am - 10:45am
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Sai Siva Kumar Pinnepalli1,Raja Sekhar Bale1,Rupak Thapa2,1,Vamseedhara Vemuri3,Nathan Oyler1,Nicholas Strandwitz3,Sean King2,Michelle Paquette1
University of Missouri Kansas City1,Intel Corporation2,Lehigh University3
Keywords
B | surface chemistry | x-ray photoelectron spectroscopy (XPS)
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Francesca Iacopi
Pei-Wen Li