April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.13.02
Supply Chain Challenges to Advancing BEOL Scaling and Materials Development
When and Where
Apr 25, 2023
1:15pm - 1:45pm
1:15pm - 1:45pm
EL19-virtual
Presenter(s)
Co-Author(s)
Sean King1
Intel Corp1
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Paul Berger
Supratik Guha