April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.09.04
Advanced Logic Scaling Using Monolithic 3D Integration
When and Where
Apr 13, 2023
4:00pm - 4:30pm
4:00pm - 4:30pm
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Marko Radosavljevic1
Intel Corporation1
Keywords
metrics
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Supratik Guha
Francesca Iacopi
Ehrenfried Zschech