April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.03.04
Process Development and Material Characterization for ALD Indium Tin Oxide (ITO) Thin Films
When and Where
Apr 11, 2023
4:15pm - 4:30pm
4:15pm - 4:30pm
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Qi Jiang1,Nathalie Moreno1,Shuhan Liu1,Xinyi Wen1,Kasidit Toprasertpong2,Vijay Narasimhan3,Graham Ewing1,Michelle Rincon4,Angelica Zacatzi3,Swaroop Kommera1,Ravi Kanjolia3,H.S. Philip Wong1
Stanford University1,The University of Tokyo2,EMD Electronics3,Onsemi4
Keywords
atomic layer deposition | oxide | thin film
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Benji Maruyama
Ehrenfried Zschech