April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL01.03.07
Identification of Structural Phases in Al Doped HfO2-Based Ferroelectric Films by DFT-Assisted EXAFS Analysis
When and Where
Apr 12, 2023
11:45am - 12:00pm
11:45am - 12:00pm
Moscone West, Level 3, Room 3001
Presenter(s)
Co-Author(s)
Mehmet Sahiner1,Rory Vander Valk1,Eric Kurywczak1,Joshua Steier1,Stephen Kelty1,Bruce Ravel2,Joseph Woicik2,Jean Jordan-Sweet3,Christian Lavoie3,Martin Frank3
Seton Hall Univ1,National Institute of Standards and Technology2,IBM T.J. Watson Research Center3
Keywords
atomic layer deposition | crystallographic structure | electrical properties
Symposium Organizers
Stefania Privitera, CNR
Carlos Ríos, University of Maryland
Syed Ghazi Sarwat, IBM
Matthias Wuttig, RWTH Aachen University
Session Chairs
Kotaro Makino
Sharon Weiss
Nathan Youngblood