April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.10.11
ALD-prepared Metal Nitrides with Tunable (Super)conductivity by Ion Energy Control
When and Where
Apr 13, 2023
5:00pm - 7:00pm
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall
Presenter(s)
Co-Author(s)
Erwin Kessels1,Silke Peeters1,Marc Merkx1,Mariadriana Creatore1,Adrie Mackus1,Harm Knoops1,2
Eindhoven Univ of Technology1,Oxford Instruments Plasma Technology2
Keywords
nitride | selective area deposition
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Paul Berger
Pei-Wen Li