April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL01.08.03
Epitaxial VO2 on Si 100 via TiN Buffer Layer for CMOS Applications
When and Where
Apr 13, 2023
3:30pm - 3:45pm
3:30pm - 3:45pm
Moscone West, Level 3, Room 3001
Presenter(s)
Co-Author(s)
Rama Satya Ventrapragada1,Arvind Rajnarayan1,Yeswanth Pattipati1,Sandeep Vura1,Sushobhan Avasthi1
Indian Institute of Science1
Keywords
oxide | transmission electron microscopy (TEM)
Symposium Organizers
Stefania Privitera, CNR
Carlos Ríos, University of Maryland
Syed Ghazi Sarwat, IBM
Matthias Wuttig, RWTH Aachen University
Session Chairs
Valeria Bragaglia
Stephan Menzel