April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.08.07
Damage-Free Deposition of Aluminum-Based High-κ Dielectrics on Graphene by PEALD
When and Where
Apr 13, 2023
11:00am - 11:15am
11:00am - 11:15am
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Ardeshir Esteki1,Alwin Daus1,Sarah Riazimehr2,Harm Knoops2,3,Federico Fabrizi4,1,Maryam Mohammadi4,Martin Otto4,Gordon Rinke4,Max Lemme1,4
RWTH Aachen1,Oxford Instruments Plasma Technology UK2,Technische Universiteit Eindhoven3,AMO GmbH4
Keywords
graphene
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Mark Eriksson
Pei-Wen Li