April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.08.07

Damage-Free Deposition of Aluminum-Based High-κ Dielectrics on Graphene by PEALD

When and Where

Apr 13, 2023
11:00am - 11:15am
Moscone West, Level 3, Room 3020

Presenter(s)

Co-Author(s)

Ardeshir Esteki1,Alwin Daus1,Sarah Riazimehr2,Harm Knoops2,3,Federico Fabrizi4,1,Maryam Mohammadi4,Martin Otto4,Gordon Rinke4,Max Lemme1,4

RWTH Aachen1,Oxford Instruments Plasma Technology UK2,Technische Universiteit Eindhoven3,AMO GmbH4

Keywords

graphene

Symposium Organizers

Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University

Symposium Support

Gold
IEEE Electron Devices Society

Session Chairs

Mark Eriksson
Pei-Wen Li

In this Session