April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SB03.02.02

Modelling the Key Reaction Steps for Plasma-Enhanced and Thermal Atomic Layer Deposition of Cobalt Thin Film for the Next Generation Interconnect

When and Where

Apr 11, 2023
1:45pm - 2:00pm
Moscone West, Level 2, Room 2014

Presenter(s)

Co-Author(s)

Ji Liu1,Michael Nolan1

Tyndall National Institute1

Keywords

atomic layer deposition | plasma deposition

Symposium Organizers

Yei Hwan Jung, Hanyang University
Kyungjin Kim, University of Connecticut
Young T. Kim, Virginia Tech
Lokendra Pal, North Carolina State University

Session Chairs

Necmi Biyikli
Kyungjin Kim

In this Session