April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SB03.09.02

Dry Thin-Film Processing for New Generation Devices—From the Role of Nanoporosity in Barrier Layers to the (Un)Wanted Effect of the Harsh Plasma Environment

When and Where

Apr 26, 2023
8:30am - 9:00am
SB03-virtual

Presenter(s)

Co-Author(s)

Alberto Perrotta1

National Research Council (CNR)1

Keywords

atomic layer deposition | plasma deposition

Symposium Organizers

Yei Hwan Jung, Hanyang University
Kyungjin Kim, University of Connecticut
Young T. Kim, Virginia Tech
Lokendra Pal, North Carolina State University

Session Chairs

Yei Hwan Jung
Kyungjin Kim

In this Session