April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL21.03.04

Confined Conducting Filaments in HfO2-Based Resistive Random Access Memory by Al2O3 Nanodome Shaped Arrays (NDSAs) via Glancing Angle Deposition Technology Toward Neuromorphic Computing

When and Where

Apr 11, 2023
4:15pm - 4:30pm
Moscone West, Level 3, Room 3011

Presenter(s)

Co-Author(s)

Ying-Chun Shen1,Yu-Lun Chueh1

National Tsing Hua University1

Keywords

nanostructure | oxide

Symposium Organizers

Iuliana Radu, Taiwan Semiconductor Manufacturing Company Limited
Heike Riel, IBM Research GmbH
Subhash Shinde, University of Notre Dame
Hui Jae Yoo, Intel Corporation

Symposium Support

Gold
Center for Sustainable Energy (ND Energy) and Office of Research

Silver
Raith America, Inc.

Session Chairs

Isha Datye
Subhash Shinde

In this Session