April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SB03.01.03

Elucidating the Surface Adsorption and Substitution Reaction Mechanism of a Heteroleptic CpZr(NMe2)3 Precursor in Atomic Layer Deposition

When and Where

Apr 11, 2023
11:15am - 11:30am
Moscone West, Level 2, Room 2014

Presenter(s)

Co-Author(s)

Choi Aerim1,Il-Kwon Oh1

Ajou University1

Keywords

absorption | defects

Symposium Organizers

Yei Hwan Jung, Hanyang University
Kyungjin Kim, University of Connecticut
Young T. Kim, Virginia Tech
Lokendra Pal, North Carolina State University

Session Chairs

Necmi Biyikli
Kyungjin Kim

In this Session