April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.02.02
Enabling Nanoscale Tomographic Materials Analysis with Multi-Probes Scalpel SPM
When and Where
Apr 11, 2023
2:00pm - 2:15pm
2:00pm - 2:15pm
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Umberto Celano2,3,Deepanjan Sharma1,Matthew Tedaldi1,A.D.L. Humphris1,J.P. Hole1
Infinitesima Ltd.1,Arizona State University2,imec3
Keywords
atom probe microscopy | atom probe tomography | autonomous research
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Pei-Wen Li
Tseung-Yuen Tseng