April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.07.13

Deformable Carbon Atomic Film-based Etching Mask

When and Where

Apr 12, 2023
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall

Presenter(s)

Co-Author(s)

Jiwoo Kim1,Dong Hoon Moon1,Gwan-Hyoung Lee1

Seoul National University1

Keywords

2D materials | lithography (removal) | nanostructure

Symposium Organizers

Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University

Symposium Support

Gold
IEEE Electron Devices Society

Session Chairs

Supratik Guha
Francesca Iacopi

In this Session