April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SF03.16.02
Longitudinal Sound Speed and Thermal Properties of Atomic Layer Deposition-Grown Amorphous AlN/Al2O3 Multilayers with Varying Oxygen Composition
When and Where
Apr 14, 2023
8:15am - 8:30am
8:15am - 8:30am
Marriott Marquis, B2 Level, Golden Gate A
Presenter(s)
Co-Author(s)
Md Shafkat Bin Hoque1,Ian Brummel1,Eric R. Hoglund1,Jaymes Dionne2,Kiumars Aryana1,John Tomko1,John Gaskins1,Daniel Hirt1,Sean W. Smith3,Thomas Beechem4,James Howe1,Ashutosh Giri2,Jon Ihlefeld1,Patrick Hopkins1
University of Virginia1,University of Rhode Island2,Radiant Technologies3,Purdue University4
Keywords
chemical composition
Symposium Organizers
Yongjie Hu, University of California, Los Angeles
Lucas Lindsay, Oak Ridge National Laboratory
Amy Marconnet, Purdue University
Ivana Savic, Tyndall National Institute
Session Chairs
Tianli Feng
Lucas Lindsay