April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
SF05.09.05
Nucleation Enhancement Mechanism of Ruthenium Metals Thin Films by Atomic Layer Deposition
When and Where
Apr 13, 2023
3:30pm - 3:45pm
3:30pm - 3:45pm
Marriott Marquis, B2 Level, Golden Gate B
Presenter(s)
Co-Author(s)
Amnon Rothman1,Dionysis Tsousis1,Stacey Bent1
Stanford University1
Keywords
atomic layer deposition | nucleation & growth
Symposium Organizers
Sijie Chen, Karolinska Institutet
Ben Zhong Tang, South China University of Technology
Shuai Zhang, University of Washington
Xin Zhang, Pacific Northwest National Laboratory
Symposium Support
Silver
Aggregate (C/o South China University of Technology-SCUT)
Ming Wai Lau Centre for Reparative Medicine, Karolinska Institutet
Bronze
Molecular Engineering & Sciences Institute | University of Washington
Pacific Northwest National Laboratory
Aggregate (C/o South China University of Technology-SCUT)
Ming Wai Lau Centre for Reparative Medicine, Karolinska Institutet
Bronze
Molecular Engineering & Sciences Institute | University of Washington
Pacific Northwest National Laboratory
Session Chairs
Shuai Zhang