April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.07.06
Effects of Metal Diffusion on Electrical Performance and Reliability of Low Dielectric Constant Thin Films Fabricated by Plasma-Enhanced Chemical Deposition Method Under Thermal Stress
When and Where
Apr 12, 2023
5:00pm - 7:00pm
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall
Presenter(s)
Co-Author(s)
Seonhee Jang1,Rajib Chowdhury1,Thomas Poche1
University of Louisiana at Lafayette1
Keywords
plasma-enhanced CVD (PECVD) (deposition) | thin film
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Supratik Guha
Francesca Iacopi