April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
NM01.02.05

Study on the Low-Damage Atomic Layer Etch of Various Two-Dimensional Materials

When and Where

Apr 12, 2023
3:30pm - 3:45pm
InterContinental, Fourth Floor, Telegraph Hill

Presenter(s)

Co-Author(s)

Dongryul Lee1,Jihyun Kim2

Korea University1,Seoul National University2

Keywords

2D materials | atomic layer etching | chemical reaction

Symposium Organizers

Sambeeta Das, University of Delaware
Zhifeng Ren, University of Houston
Wei Wang, Aramco Americas: Aramco Research Center-Boston
Christopher Wirth, Case Western Reserve University

Session Chairs

Zhifeng Ren
Christopher Wirth

In this Session