April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
NM01.02.05
Study on the Low-Damage Atomic Layer Etch of Various Two-Dimensional Materials
When and Where
Apr 12, 2023
3:30pm - 3:45pm
3:30pm - 3:45pm
InterContinental, Fourth Floor, Telegraph Hill
Presenter(s)
Co-Author(s)
Dongryul Lee1,Jihyun Kim2
Korea University1,Seoul National University2
Keywords
2D materials | atomic layer etching | chemical reaction
Symposium Organizers
Sambeeta Das, University of Delaware
Zhifeng Ren, University of Houston
Wei Wang, Aramco Americas: Aramco Research Center-Boston
Christopher Wirth, Case Western Reserve University
Session Chairs
Zhifeng Ren
Christopher Wirth