April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
NM04.04.07
Isotropic Atomic Layer Etching of TiN by Oxidation to TiO2 and Selective Etching of TiO2 by SF6 and H2 Plasma
When and Where
Apr 12, 2023
3:45pm - 4:00pm
3:45pm - 4:00pm
InterContinental, Fifth Floor, Ballroom B
Presenter(s)
Co-Author(s)
Azmain Hossain1,Haozhe Wang1,David Catherall1,Russ Renzas2,Harm Knoops2,3,Austin Minnich1
California Institute of Technology1,Oxford Instruments2,Technische Universiteit Eindhoven3
Keywords
atomic layer deposition | thin film
Symposium Organizers
Fatemeh Ahmadpoor, New Jersey Institute of Technology
Wenpei Gao, North Carolina State University
Mohammad Naraghi, Texas A&M University
Chenglin Wu, Missouri University of Science and Technology
Session Chairs
Fatemeh Ahmadpoor
Mohammad Naraghi