April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
NM04.04.07
Isotropic Atomic Layer Etching of TiN by Oxidation to TiO2 and Selective Etching of TiO2 by SF6 and H2 Plasma
When and Where
Apr 12, 2023
3:45pm - 4:00pm
3:45pm - 4:00pm
InterContinental, Fifth Floor, Ballroom B
Presenter(s)
Co-Author(s)
Azmain Hossain1,Haozhe Wang1,David Catherall1,Russ Renzas2,Harm Knoops2,3,Austin Minnich1
California Institute of Technology1,Oxford Instruments2,Technische Universiteit Eindhoven3
Keywords
atomic layer deposition | thin film
Symposium Organizers
Fatemeh Ahmadpoor, New Jersey Institute of Technology
Wenpei Gao, North Carolina State University
Mohammad Naraghi, Texas A&M University
Chenglin Wu, Missouri University of Science and Technology
Session Chairs
Fatemeh Ahmadpoor
Mohammad Naraghi