April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL09.01.02
Direct Growth of Graphene on UVC-LEDs by a Plasma-Enhanced Low Temperature CVD Process
When and Where
Apr 11, 2023
11:00am - 11:15am
11:00am - 11:15am
Moscone West, Level 3, Room 3009
Presenter(s)
Co-Author(s)
Hehe Zhang1,Umut Kaya1,Johanna Meier1,Wolfgang Mertin1,Gerd Bacher1
Werkstoffe der Elektrotechnik & CENIDE1
Keywords
2D materials | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Sonia Conesa Boj, Technische Universiteit Delft
Thomas Kempa, Johns Hopkins University
Sudha Mokkapati, Monash University
Esther Alarcon-Llado, AMOLF
Session Chairs
Sudha Mokkapati