April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SF03.14.03

Resolution Limits of Frequency Domain Thermoreflectance for Interconnect Damage in Heterogeneously Integrated Microsystems

When and Where

Apr 13, 2023
4:15pm - 4:30pm
Marriott Marquis, B2 Level, Golden Gate A

Presenter(s)

Co-Author(s)

Wyatt Hodges1,Amun Jarzembski1,Brenden Herkenhoff1,Ben Treweek1,Anthony McDonald1,Matt Jordan1,Tim Walsh1,G. W. Pickrell1

Sandia National Laboratories1

Keywords

metrology | thermal conductivity

Symposium Organizers

Yongjie Hu, University of California, Los Angeles
Lucas Lindsay, Oak Ridge National Laboratory
Amy Marconnet, Purdue University
Ivana Savic, Tyndall National Institute

Session Chairs

Elif Ertekin
Ivana Savic

In this Session