April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL18.09.07

Formation of NiSi by Pulsed Laser Annealing on Contact Resistance Reduction and its Applications on Flexible Inverter and 6T-SRAM

When and Where

Apr 12, 2023
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall

Presenter(s)

Co-Author(s)

Yu Chieh Hsu1,Yan Yu Chen1,Jia-Min Shieh2,Wen-Hsien Huang2,Chang-Hong Shen2,Yu-Lun Chueh1

National Tsing Hua University1,Taiwan Semiconductor Research Institute2

Keywords

laser annealing

Symposium Organizers

Ho-Hsiu Chou, National Tsing Hua University
Francisco Molina-Lopez, KU Leuven
Sihong Wang, University of Chicago
Xuzhou Yan, Shanghai Jiao Tong University

Symposium Support

Bronze
Azalea Vision
MilliporeSigma
Device, Cell Press

Session Chairs

Ho-Hsiu Chou
Francisco Molina-Lopez
Sihong Wang

In this Session