April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL01.03.01

Materials Design of OTS Selectors and Phase-Change Materials for 3D Cross-Point Memory Technology

When and Where

Apr 12, 2023
9:00am - 9:30am
Moscone West, Level 3, Room 3001

Presenter(s)

Co-Author(s)

Huai-Yu Cheng1,2,Wei-Chih Chien1,2,Alexander Grun1,2,Matthew BrightSky1,3,Hsiang-Lan Lung1,2

IBM/Macronix PCRAM Joint Project1,Macronix International Co.2,IBM T. J. Watson Research Center3

Keywords

sputtering | thin film

Symposium Organizers

Stefania Privitera, CNR
Carlos Ríos, University of Maryland
Syed Ghazi Sarwat, IBM
Matthias Wuttig, RWTH Aachen University

Session Chairs

Kotaro Makino
Sharon Weiss
Nathan Youngblood

In this Session