April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL01.03.01
Materials Design of OTS Selectors and Phase-Change Materials for 3D Cross-Point Memory Technology
When and Where
Apr 12, 2023
9:00am - 9:30am
9:00am - 9:30am
Moscone West, Level 3, Room 3001
Presenter(s)
Co-Author(s)
Huai-Yu Cheng1,2,Wei-Chih Chien1,2,Alexander Grun1,2,Matthew BrightSky1,3,Hsiang-Lan Lung1,2
IBM/Macronix PCRAM Joint Project1,Macronix International Co.2,IBM T. J. Watson Research Center3
Keywords
sputtering | thin film
Symposium Organizers
Stefania Privitera, CNR
Carlos Ríos, University of Maryland
Syed Ghazi Sarwat, IBM
Matthias Wuttig, RWTH Aachen University
Session Chairs
Kotaro Makino
Sharon Weiss
Nathan Youngblood