April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.09.01
High-performance and CMOS-BEOL compatible AlScN/MoS2 FE-FET array
When and Where
Apr 13, 2023
1:45pm - 2:00pm
1:45pm - 2:00pm
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
KwanHo Kim1,Jeffrey Zheng1,Roy Olsson1,Deep Jariwala1
University of Pennsylvania1
Keywords
2D materials | nitride
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Supratik Guha
Francesca Iacopi
Ehrenfried Zschech