Development of Silicon-Gradient Block Copolymers as EUV Lithography Inorganic Pattern Masks

Nov 29, 2023
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Jeehyun Hong

Jeehyun Hong¹,Yeon Sik Jung¹

KAIST¹

nanostructure | organometallic | self-assembly

Craig Brown, National Institute of Standards and Technology

Michelle Dolgos, University of Calgary

Rie Makiura, Osaka Metropolitan University

Brent Melot, University of Southern California

Bronze
Anton Paar
Hiden Analytical Inc

Craig Brown

Brent Melot