November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
EL11.13.03

Towards Growth of High Quality Cubic Boron Nitride using Fluorine Chemistry

When and Where

Dec 1, 2023
9:15am - 9:30am
Hynes, Level 2, Room 210

Presenter(s)

Co-Author(s)

Ali Ebadi Yekta1,Avani Patel1,Robert Nemanich1

Arizona State University1

Keywords

chemical vapor deposition (CVD) (chemical reaction) | plasma-enhanced CVD (PECVD) (chemical reaction) | x-ray photoelectron spectroscopy (XPS)

Symposium Organizers

Stephen Goodnick, Arizona State University
Robert Kaplar, Sandia National Laboratories
Martin Kuball, University of Bristol
Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Symposium Support

Silver
Taiyo Nippon Sanson

Session Chairs

Jack Flicker
Robert Kaplar

In this Session