Modulation of Electrical and Thermal Properties of Niobium Oxide by Alternating Oxygen and Hydrogen Plasma in Atomic Layer Deposition

Nov 28, 2023
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Yunha Jung

Eunjoo Jung

Hyun Soo Han

Woosung Park

Fritz Prinz

Yunha Jung¹,Settasit Chaikasetsin¹,Heungdong Kwon¹,Eunjoo Jung²,Hyun soo Han¹,Woosung Park²,Fritz Prinz¹

Stanford University¹,Sogang University²

thermal conductivity | thin film

Craig Brown, National Institute of Standards and Technology

Michelle Dolgos, University of Calgary

Rie Makiura, Osaka Metropolitan University

Brent Melot, University of Southern California

Bronze
Anton Paar
Hiden Analytical Inc

Craig Brown

Brent Melot