November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
SF04.11.02

Deposition of (Multi)functional Thin Films by Coupling a Dielectric Barrier Discharge with an Aerosol: Role of Pulsed Precursor Injection

When and Where

Nov 29, 2023
4:00pm - 4:15pm
Sheraton, Second Floor, Independence East

Presenter(s)

Co-Author(s)

Laura Cacot1,2,Luc Stafford1,Nicolas Naudé2,Richard Clergereaux2

University of Montreal1,Laplace2

Keywords

plasma deposition | plasma-enhanced CVD (PECVD) (deposition)

Symposium Organizers

Rebecca Anthony, Michigan State University
Fiorenza Fanelli, Consiglio Nazionale delle Ricerche
Tsuyohito Ito, The University of Tokyo
Lorenzo Mangolini, University of California, Riverside

Session Chairs

Rebecca Anthony
Lorenzo Mangolini

In this Session