Defect Density Minimization in ALD Passivation Layers by Bayesian Optimization

Nov 28, 2023
11:45am - 12:00pm

Sheraton, Second Floor, Back Bay A

Gül Dogan

Utku Culha

Metin Sitti

Sinan Ozgun Demir^1,2,Gül Dogan^1,3,Utku Culha^1,4,Kahraman Keskinbora¹,Metin Sitti^1,5,6

Max Planck Institute for Intelligent Systems¹,University of Stuttgart²,Robert Bosch GmbH³,Technical University of Munich⁴,ETH Zürich⁵,Koc University⁶

atomic layer deposition

Mathieu Bauchy, University of California, Los Angeles

Ekin Dogus Cubuk, Google

Grace Gu, University of California, Berkeley

N M Anoop Krishnan, Indian Institute of Technology Delhi

Bronze
Patterns and Matter | Cell Press

Grace Gu

Rama Vasudevan