November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL14.04.06

Homoepitaxial Diamond Growth Initiation on Smooth CMP Surfaces at Various Mis-Cut Angles

When and Where

Nov 27, 2023
8:00pm - 10:00pm
Hynes, Level 1, Hall A

Presenter(s)

Co-Author(s)

Timothy Grotjohn1,S M Asaduzzaman1

Michigan State University1

Keywords

atom probe microscopy | CMP (chemical mechanical processing) | vapor phase epitaxy (VPE)

Symposium Organizers

Philippe Bergonzo, Seki Diamond Systems
Chia-Liang Cheng, National Dong Hwa University
David Eon, Institut Neel
Anke Krueger, Stuttgart University

Symposium Support

Platinum
Great Lakes Crystal Technologies

Gold
Element Six

Silver
Plasmability, LLC
Qnami AG
SEKI DIAMOND SYSTEMS

Bronze
Applied Diamond, Inc.
DIAMFAB
Fraunhofer USA, Inc.

Session Chairs

David Moran
Mariko Suzuki

In this Session