Optical and Structural Characterization of ScO_xN_y and ScSi_zO_xN_y Thin Films as Dispersion Engineered Optical Materials

When and Where

Nov 29, 2023
11:00am - 11:15am

Hynes, Level 3, Room 312

Presenter(s)

Smridhi Chawla

Kristian Munnikhuis

Tornike Shubitidze

Wesley Britton

David Woolf

Luca Dal Negro

Co-Author(s)

Smridhi Chawla¹,Kristian Munnikhuis¹,Tornike Shubitidze¹,Wesley Britton²,David Woolf²,Luca Dal Negro¹

Boston University¹,Physical Sciences, Inc.²

Keywords

Sc | thin film

Symposium Organizers

Viktoriia Babicheva, University of New Mexico

Yu-Jung Lu, Academia Sinica

Benjamin Vest, Institut d'Optique Graduate School

Ho Wai (Howard) Lee, University of California, Irvine

Symposium Support

Bronze
ACS Photonics | ACS Publications
APL Quantum | AIP Publishing
Enli Technology Co., LTD
Nanophotonics | De Gruyter
Taiwan Semiconductor Manufacturing Company Limited (TSMC)

Session Chairs

Ho Wai (Howard) Lee

Yu-Jung Lu

Symposium Supporters

2023 MRS Fall Meeting & Exhibit

Optical and Structural Characterization of ScOxNy and ScSizOxNy Thin Films as Dispersion Engineered Optical Materials