November 26 - December 1, 2023
Boston, Massachusetts

Event Supporters

2023 MRS Fall Meeting
DS01.02.08

Autonomous Synthesis of Sputtered Nitride Thin Films with Controlled Cation Composition

When and Where

Nov 27, 2023
4:00pm - 4:15pm
Sheraton, Third Floor, Fairfax B

Presenter(s)

Co-Author(s)

Davi Febba1,Kevin Talley1,Kendal Johnson1,Stephen Schaefer1,Sage Bauers1,John Mangum1,Rebecca Smaha1,Andriy Zakutayev1

National Renewable Energy Laboratory1

Keywords

chemical composition | sputtering

Symposium Organizers

Milad Abolhasani, North Carolina State University
Keith Brown, Boston University
B. Reeja Jayan, Carnegie Mellon University
Xiaonan Wang, Tsinghua University

Session Chairs

Milad Abolhasani
Keith Brown

In this Session