November 26 - December 1, 2023

Boston, Massachusetts

Symposium Supporters

2023 MRS Fall Meeting & Exhibit

EL11.11.10

Optimizing Si Implantation and Annealing in β-Ga₂O₃ and β-(Al_xGa_1-x)₂O₃

When and Where

Nov 30, 2023
11:30am - 11:45am

Hynes, Level 2, Room 210

Presenter(s)

Katie Gann

Naomi Pieczulewski

Cameron Gorsak

Karen Heinselman

Kathleen Smith

Thaddeus Asel

Brenton Noesges

Huili Xing

Debdeep Jena

David Muller

Hari Nair

Michael Thompson

Co-Author(s)

Katie Gann¹,Naomi Pieczulewski¹,Cameron Gorsak¹,Karen Heinselman²,Kathleen Smith¹,Thaddeus Asel³,Brenton Noesges³,Huili Xing¹,Debdeep Jena¹,David Muller¹,Hari Nair¹,Michael Thompson¹

Cornell University¹,National Renewable Energy Laboratory²,Air Force Research Laboratory³

Keywords

annealing | electrical properties | ion-implantation

Symposium Organizers

Stephen Goodnick, Arizona State University

Robert Kaplar, Sandia National Laboratories

Martin Kuball, University of Bristol

Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Symposium Support

Silver
Taiyo Nippon Sanson

Session Chairs

Stephen Goodnick

Robert Kaplar