Combinatorial Synthesis of Highly-Oriented Ferroelectric AlScN Thin Films using Metal-Ion Synchronized High-Power Impulse Magnetron Sputtering.

Nov 28, 2023
2:30pm - 2:45pm

Hynes, Level 1, Room 107

Siarhei Zhuk

Amit Sharma

Sebastian Siol¹,Jyotish Patidar¹,Siarhei Zhuk¹,Amit Sharma²,Monalisa Ghosh¹,Alexander Wieczorek¹,Kerstin Thorwarth¹

Empa - Swiss Federal Institute of Materials Science and Technology¹,Empa - Swiss Federal Laboratories for Materials Science and Technology²

III-V | physical vapor deposition (PVD)

John Heron, University of Michigan

Johanna Nordlander, Harvard University

Bhagwati Prasad, Indian Institute of Science

Morgan Trassin, ETH Zurich

Bronze
Kepler Computing
SONERA

John Heron

Morgan Trassin