November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL19.01.02

Area-Selective Atomic Layer Deposition on a 2D Monolayer Lateral Superlattice

When and Where

Nov 27, 2023
11:00am - 11:15am
Hynes, Level 3, Room 309

Presenter(s)

Co-Author(s)

Jeongwon Park1,Seung Jae Kwak2,Won Bo Lee2,YongJoo Kim3,Kibum Kang1

Korea Advanced Institute of Science and Technology (KAIST)1,Seoul National University (SNU)2,Kookmin University3

Keywords

atomic layer deposition | chemical vapor deposition (CVD) (deposition) | selective area deposition

Symposium Organizers

Sanjay Behura, San Diego State University
Kibum Kang, Korea Advanced Institute of Science and Technology
Andrew Mannix, Stanford University
Hyeon-Jin Shin, Gwangju Institute of Science and Technology

Session Chairs

Kibum Kang
Andrew Mannix

In this Session