November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
SF04.10.02

Reactive HiPIMS of Hydrogenated Amorphous Carbon using Toluene Precursor

When and Where

Nov 29, 2023
2:00pm - 2:15pm
Sheraton, Second Floor, Independence East

Presenter(s)

Co-Author(s)

Monalisa Ghosh1,Kerstin Thorwarth1,Götz Thorwarth2,Olesya Nakonechna1,Arnold Müller3,Christof Vockenhuber3,Sebastian Siol1

Empa–Swiss Federal Laboratories for Materials Science and Technology1,IMT2,ETH Zürich3

Keywords

C | physical vapor deposition (PVD) | thin film

Symposium Organizers

Rebecca Anthony, Michigan State University
Fiorenza Fanelli, Consiglio Nazionale delle Ricerche
Tsuyohito Ito, The University of Tokyo
Lorenzo Mangolini, University of California, Riverside

Session Chairs

Rebecca Anthony
Lorenzo Mangolini

In this Session