November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
SF04.03.01

Microplasma Engineering of Nanomaterials Synthesis and Applications

When and Where

Nov 27, 2023
3:30pm - 4:00pm
Sheraton, Second Floor, Independence East

Presenter(s)

Co-Author(s)

Wei-Hung Chiang1,Darwin Kurniawan1,Yi-Jui Yeh1,2,Yan-Yi Chen1

National Taiwan University of Science and Technology1,National Taiwan University2

Keywords

plasma-enhanced CVD (PECVD) (chemical reaction)

Symposium Organizers

Rebecca Anthony, Michigan State University
Fiorenza Fanelli, Consiglio Nazionale delle Ricerche
Tsuyohito Ito, The University of Tokyo
Lorenzo Mangolini, University of California, Riverside

Session Chairs

Sumit Agarwal
Bruno Alessi

In this Session