November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL03.05.03

Ferroelectric Property Improvement of (Al1-x-yGaxScy)N Ternary Thin Films

When and Where

Nov 28, 2023
2:00pm - 2:15pm
Hynes, Level 1, Room 107

Presenter(s)

Co-Author(s)

Hiroshi Funakubo1,Reika Ota1,Shinnosuke Yasuoka1,Kazuki Okamoto:1,Yoshihiro Ueoka2,Yoshiro Kususe2,Masami Mesuda2

Tokyo Institute of Technology1,Tosoh Corporation2

Keywords

nitride | sputtering

Symposium Organizers

John Heron, University of Michigan
Johanna Nordlander, Harvard University
Bhagwati Prasad, Indian Institute of Science
Morgan Trassin, ETH Zurich

Symposium Support

Bronze
Kepler Computing
SONERA

Session Chairs

John Heron
Morgan Trassin

In this Session