November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL19.20.03

Computational Design of Plasma Process for High Purity Layer Thinning of 4-In MoS2

When and Where

Dec 1, 2023
2:00pm - 2:15pm
Hynes, Level 3, Room 309

Presenter(s)

Co-Author(s)

Muyoung Kim1,Changmin Kim1,Hyeong-U Kim1,Daewoong Kim1,Taesung Kim2,Woo Seok Kang1

Korea Institute of Machinery and Materials1,Sungkyunkwan University2

Keywords

plasma-enhanced CVD (PECVD) (deposition) | reactive ion etching

Symposium Organizers

Sanjay Behura, San Diego State University
Kibum Kang, Korea Advanced Institute of Science and Technology
Andrew Mannix, Stanford University
Hyeon-Jin Shin, Gwangju Institute of Science and Technology

Session Chairs

Sanjay Behura
Andrew Mannix

In this Session