Low-Cost and Scalable Manufacturing of Optical Metasurfaces in the Visible using Engineered Optical Materials (PER, Low-Loss a-Si:H, and Hybrid ALD Structural Resin)

When and Where

Nov 27, 2023
10:30am - 11:00am

Hynes, Level 3, Room 312

Presenter(s)

Junsuk Rho

Joohoon Kim

Co-Author(s)

Joohoon Kim¹,Junsuk Rho¹

Pohang University of Science and Technology¹

Keywords

plasma-enhanced CVD (PECVD) (deposition) | polymer

Symposium Organizers

Viktoriia Babicheva, University of New Mexico

Yu-Jung Lu, Academia Sinica

Benjamin Vest, Institut d'Optique Graduate School

Ho Wai (Howard) Lee, University of California, Irvine

Symposium Support

Bronze
ACS Photonics | ACS Publications
APL Quantum | AIP Publishing
Enli Technology Co., LTD
Nanophotonics | De Gruyter
Taiwan Semiconductor Manufacturing Company Limited (TSMC)

Session Chairs

Ho Wai (Howard) Lee

Yang Zhao

Symposium Supporters

2023 MRS Fall Meeting & Exhibit