May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.06.07
In Situ Characterization of Cleaning and Passivation of Cu Surface for Applications to Area Selective Atomic Layer Deposition
When and Where
May 10, 2022
11:00am - 11:15am
11:00am - 11:15am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Jiyoung Kim1,Su Min Hwang1,Dan Le1,Jin-Hyun Kim1,Yong Chan Jung1,Jean- Veyan1,Daniel Alvarez2,Jeff Spiegelman2
The University of Texas at Dallas1,Rasirc Inc2
Keywords
atomic layer deposition | infrared (IR) spectroscopy | selective area deposition
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag
Mandakini Kanungo
Adrie Mackus